JPH02131650U - - Google Patents
Info
- Publication number
- JPH02131650U JPH02131650U JP14246089U JP14246089U JPH02131650U JP H02131650 U JPH02131650 U JP H02131650U JP 14246089 U JP14246089 U JP 14246089U JP 14246089 U JP14246089 U JP 14246089U JP H02131650 U JPH02131650 U JP H02131650U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- vacuum container
- analyzer
- source
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001133 acceleration Effects 0.000 claims 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000992 sputter etching Methods 0.000 claims 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989142460U JPH04303Y2 (en]) | 1989-12-07 | 1989-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989142460U JPH04303Y2 (en]) | 1989-12-07 | 1989-12-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02131650U true JPH02131650U (en]) | 1990-11-01 |
| JPH04303Y2 JPH04303Y2 (en]) | 1992-01-07 |
Family
ID=31689285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989142460U Expired JPH04303Y2 (en]) | 1989-12-07 | 1989-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04303Y2 (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53107392A (en) * | 1977-02-28 | 1978-09-19 | Shimadzu Corp | Compound analyzer using excitation beam |
| JPS53119986U (en]) * | 1977-02-28 | 1978-09-25 |
-
1989
- 1989-12-07 JP JP1989142460U patent/JPH04303Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53107392A (en) * | 1977-02-28 | 1978-09-19 | Shimadzu Corp | Compound analyzer using excitation beam |
| JPS53119986U (en]) * | 1977-02-28 | 1978-09-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04303Y2 (en]) | 1992-01-07 |
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